Semiconductor Water Treatment
Semiconductor water treatment is Ultra-Pure Water treatment aiming to reduce inorganics, organics, particulates (inorganic, organic and biological) and gases in water to the ppb range.
The technologies used are UF, RO, EDI, Mixed Bed Ion Exchange, Advanced Oxidation Processes (AOP's), UV, Active Carbon Filtration, combustion/heat and sometimes Membrane Contactors for degasification.
Chemicals used have to be semiconductor grade. Pumps used have to be of special design to minimize particle shedding. Some semiconductor grade ion exchange resins are sometimes used. UPW tanks are usually blanketed with Nitrogen to prevent the dissolution of gases such as O2 and CO2.
Impurities in semiconductor processing water have a negative impact on production yields due to defects caused by impurities in the production process.
Here is an ineresting article from Siemens Water.
Here is an interesting article from Hager El Sasser.
Here is an interesting article on waste water treatment for semiconductor industry.
Compiled by Rami E. Kremesti M.Sc.